Small Chip Photoresist Coating
Laboratory Desktop Ultrasonic Spraying System | Small Chip Photoresist Coating
In the field of micro nano electronic device research and development, the precision coating process of small-sized chips directly affects the accuracy of academic research data and experimental repeatability. The desktop ultrasonic spraying system, with its unique atomization advantage, has become an ideal choice for photoresist coating of 14 × 15mm small chips (mounted on carrier wafers), especially suitable for laboratory scenes in universities and research institutions. This type of equipment is based on ultrasonic atomization technology and meets the strict requirements of academic research for process refinement. It achieves high-precision control of photoresist coating and provides reliable support for chip performance testing and structural optimization.
Fine and uniform coating quality is one of the core demands of academic research. The functional areas of small-sized chips are highly integrated, and even micrometer level coating thickness deviations may lead to the failure of subsequent photolithography and etching processes, affecting the scientific validity of experimental data. The ultrasonic spraying system atomizes the photoresist into small droplets with uniform diameter through high-frequency vibration. With precise airflow control, the droplets can adhere evenly to the surface of the chip, effectively avoiding problems such as edge accumulation and pinhole bubbles that are prone to occur in traditional coating methods, ensuring that the coating thickness error is controlled within a very small range, and providing a stable experimental basis for researchers.
The compatibility design of photoresist using PGMEA as a solvent has further expanded the application scenarios of the equipment. PGMEA, as a commonly used solvent for photoresist, has specific chemical properties and evaporation rates. Ordinary coating equipment is prone to coating cracking caused by uneven solvent evaporation. The system optimizes the nozzle material and fluid transport path, adopts a chemically corrosion-resistant component structure, and ensures stable chemical properties of photoresist during transport and atomization processes. At the same time, it is equipped with a temperature control module to balance the solvent evaporation rate, avoid coating defects caused by rapid solvent evaporation, and ensure that the original performance of photoresist is not affected by equipment.
The combination of mobile platform and enclosed design not only enhances operational convenience but also strengthens experimental safety. The mobile stage can achieve precise movement path control through program settings. For small chip sizes of 14 × 15mm, it can automatically complete continuous coating operations for multiple chips, reducing errors caused by manual operations and improving experimental efficiency; The closed structure effectively isolates the interaction between the volatile gases of photoresist and the external environment, preventing dust and other impurities from entering the coating area and contaminating the chip. On the other hand, it avoids the diffusion of harmful gases, creating a safe experimental environment for researchers and complying with laboratory safety regulations and academic research standardization requirements.
In summary, the desktop ultrasonic spraying system, through targeted technological optimization, perfectly matches the academic research needs of photoresist coating for small-sized chips. Its advantages in coating uniformity, reagent compatibility, ease of operation, and safety provide efficient and reliable process equipment support for academic exploration in the field of micro and nano electronics, helping researchers break through the bottleneck of traditional coating technology and promoting the in-depth development of related research.
About Cheersonic
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.
If you have any technical questions, customization demands, or procurement inquiries about ultrasonic atomization nozzles, feel free to contact our professional sales and technical team for detailed parameters, customized solutions, and industry application support.
Email: market2@cheersonic.com
