Photoresist Spray Coating The photoresist spray coating system uses ultrasonic nozzle technology. Instead of traditional spin coating equipment, UAM4000L is designed for photoresist coating of wafers with high aspect ratio and deep hole topography (such as MEMS wafers). The system is usually equipped with UAC series or UAL series ultrasonic spray forming nozzles as required. UAM4000L is specially designed for 100, 150, 200 and 300mm wafers, providing automatic spraying with multi-spray storage, [...]

Spray Photoresist Ultrasonic spray photoresist technology is used for semiconductor photoresist coating. Compared with traditional coating processes such as spin coating and dip coating, it has the advantages of high uniformity, good encapsulation of microstructures, and controllable coating area. In the past 10 years, it has been fully demonstrated that the 3D microstructure surface photoresist coating using ultrasonic spraying technology, the prepared photoresist coating is significantly higher than the traditional [...]

Spray Coating Photoresist Ultrasonic Spray Coating Photoresist Photoresist coatings can be used in the production of electronic devices and microelectromechanical (MEMs) devices. Photoresists are generally polymer materials that are enhanced by exposure to light (ie, by cross-linking negative photoresist materials) or solubilized (positive photoresist materials), so , Light is used to pattern the photoresist coating on the substrate, the technique is called photolithography. Then, usually when preparing to etch and/or [...]

Ultrasonic spray pyrolysis for depositing TCO Ultrasonic spray pyrolysis equipment for depositing TCO chemistries. Uniform thin film Indium Tin Oxide (ITO), Aluminum Doped Zinc Oxide (AZO), Zinc Oxide (ZnO), and Fluorine Doped Oxide layers are often created using an ultrasonic spray pyrolysis technique. This unique process demands specialized coating equipment to create necessary coating thickness and morphology, spraying corrosive solutions in a high temperature environment. In a high temperature ultrasonic [...]

Ultrasonic spray technology for fuel cell applications Ultrasonic spray coating technology has only been used for fuel cell applications in recent years. It has been demonstrated that ultrasonic spray coating is an effective way to reduce platinum loading for fuel cells. The opti-mum catalyst ink formula and platinum loading are dependent on operating conditions. In terms of cost, opti-mum platinum loadings must be considered alongside thecost of other core components. [...]

Ultrasonic Coating for Proton Exchange Membrane Fuel Cell Ultrasonic Coating for Proton Exchange Membrane Fuel Cell Climate change and global warming have become urgent topics for green energy and carbon emission reduction. Proton exchange membrane fuel cells (PEMFC) have become a promising power source in the future due to their high power density, high efficiency, no harmful emissions, high-quality power supply, scalability and fast start-up. One of the main obstacles [...]

Ordered Membrane Electrode Ordered Membrane Electrode – Ultrasonic Spraying Membrane Electrode The catalytic layer of GDE type MEA and CCM type MEA is mixed with a catalyst and an electrolyte solution to form a catalyst slurry and then coated. The material transmission channels of the prepared MEA such as protons, electrons, gas and water are in a disordered state, resulting in material transmission The efficiency is very low, and there [...]

Fuel Cell With Nafion And Platinum The energy systems of our world obtain their energyrequirements mostly from fuel sources of fossil origin. Since these fuel sources of fossil origin have negativeenvironmental effects and are depletable, studies directedto the utility and production of clean and renewable energyresources that can be substituted for fossil originated fuelsand development of different energy systems are beingdemonstrated for a couple of decades. PEMFCs, whichare low temperature fuel [...]

Development of new catalysts for PEMFC As a versatile energy generation technology to effectively meet the stringent environmental norms, polymer electrolyte membrane fuel cells (PEMFCs) have gained significant attentionin the last few decades. Technically, among various alternate energy sources, PEMFCs have been considered as ideal systemsto serve as power sources for both stationary and mobile applications. To improve the commercial viability and customer acceptance, there are wide spread scientific efforts [...]

Gas Diffusion Layer Gas diffusion layer (GDLs) perform the significant functions in the proton exchange membrane fuel cells (PEMFCs), such as maintaining the water balance in the membrane electrode assem-bly (MEA) by allowing appropriate amount of water to move in and out from the reaction zone, providing the mechanical sup-port for the MEA and electrical contact between the electrodes and the current collectors. The key characteristics of GDLs include structural design, [...]