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Ultrasonic Spraying Photoresist on 3D Structures
Ultrasonic Spraying Photoresist on 3D Structures The advantages of ultrasonic spraying machine in spraying photoresist on three-dimensional structures In advanced micro nano manufacturing fields such as MEMS, 3D IC, TSV silicon via, etc., uniform coating of photoresist on three-dimensional complex structures is the core process difficulty. The traditional spin coating method is limited by centrifugal force and is prone to defects such as edge accumulation, bottom glue deficiency, and uneven [...]
