Spraying Photoresist onto Silicon Wafers
Spraying Photoresist onto Silicon Wafers Ultrasonic sprayer multi-nozzle technology: Overcoming the problem of uniformity of photoresist spraying on square silicon wafers In the field of semiconductor manufacturing and micro-nano processing, the accuracy of photoresist spraying on 210*210mm square silicon wafers directly determines the performance and yield of chips and precision devices. Traditional spraying methods are difficult to meet the uniform film formation requirements of large-area silicon wafers, while ultrasonic sprayers, [...]
